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The recent emergence of thin-film lithium niobate (TFLN) has extended the landscape of integrated photonics. This has been enabled by the commercialization of TFLN wafers and advanced nanofabrication of TFLN such as high-quality dry etching. However, fabrication imperfections still limit the propagation loss to a few dB/m, restricting the impact of this platform. Here, we demonstrate TFLN microresonators with a record-high intrinsic quality (Q) factor of twenty-nine million, corresponding to an ultra-low propagation loss of 1.3 dB/m. We present spectral analysis and the statistical distribution ofQfactors across different resonator geometries. Our work pushes the fabrication limits of TFLN photonics to achieve aQfactor within 1 order of magnitude of the material limit.more » « less
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Cordaro, Andrea; Edwards, Brian; Nikkhah, Vahid; Alù, Andrea; Engheta, Nader; Polman, Albert (, Nature Nanotechnology)
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